These innovations have enabled comb-drive actuators with very large strokes (±245 µm) at low actuation voltage (120V) and with small device foot-print (8 mm²). These results present the potential for eliminating sideways instability as the dominant effect that has so far limited the actuation stroke in electrostatic comb-drives.

Additionally, we have created closed-form models for the existing and proposed flexure geometries that allow a systematic and step by step procedure for designing the complete comb-drive actuator for optimal performance in a given application. This eliminates guesswork and unpredictability in the design process. Having demonstrated this high performance comb-drive architecture, we are now developing it for applications in high-speed XY MEMS scanners and micro-watt energy harvesting.

In this work, we have systematically investigated and overcome the fundamental challenges that have traditionally limited the performance of MEMS electrostatic comb-drive actuators. Novel flexure mechanism geometries that provide several orders of magnitude superior performance compared to the state-of-the-art have been designed, fabricated, and demonstrated. These have been used to show very large stroke, XY stages, and large stroke MEMS nanopositoners. Having demonstrated this high performance comb-drive architecture, we are now developing it for applications in high-speed XY MEMS scanners and micro-watt energy harvesting.